Plasma electrodes vaporize metals into gas to coat computer microchips.
The Semiconductor Industry Association (SIA) represents 90 percent of the semiconductor products produced in the United States. The multi-billion dollar semiconductor industry sells millions of tiny computer microchips, which are created with plasma electrodes. Types of plasma electrodes are: induction coupled, microwave or radio wave electrodes. Plasma electrodes at the bottom of furnace shafts, reach temperatures above 6,000 degrees Centigrade. Plasma electrodes vaporize metal, which coats copper or silicone forming semiconductors.
Electrical Discharge Plasma Electrodes
Plasma electrodes release electric current through a substance that does not conduct electricity. Air insulates. It does not conduct electricity, but a several thousand volt electric field passed through normally insulating air, creates nitrogen, oxygen and other gaseous ions. The plasma electrode causes negatively charged electrons to break off the nitrogen or oxygen atoms and leaves the positively charged ions. The ions and electrons (plasma) move separately through the high voltage creating an electrical current. Plasma conducts electrical current.
Vaccuum Arc Plasma Electrodes
Vacuum arc electrical discharges use plasma coatings in metallurgy and as plasma films. The vacuum arcs are from paired high voltage electrodes in a vacuum chamber. The electrical arc carries the ionized plasma and directs the magnetic arc to coat a microchip surface. The arc can be directed with a magnetic field. Coating microchips with a charged plasma arc is a process called "vacuum arc deposition." Liquid metal drops spray from the electrodes surface, which detract from the quality of the thin plasma coating. The inconsistent droplets are removed from the plasma beam by obstructing the flow of the plasma arc between the electrode and the semiconductor surface. This process is called "filtered vacuum arc deposition."
Corona and Glow Discharge Electrodes
Corona electrical discharge is a partial inhomogeneous electrical discharge. Corona electrical discharge is created by a high voltage electric field near a sharp electrode. Corona is a low current, high voltage discharge. Glow discharges are several hundred volts and 1 ampere of current. The low ionized current is amplified in collision with other particles. The amplification creates secondary electrons. Electrical discharges are also created by microwave or laser waves with or without electrodes.
Capacitively Coupled Plasma (CCP) Electrodes
A capacitively coupled plasma (CCP) electrode is actually two plasma electrodes with little distance between them inside a reactor. Pressure from gas within the reactor may be lower than the pressure of the atmosphere. A CCP electrode directs radio waves, usually at 13.56 MHz. One plasma electrode is attached to the electric power, and the other one is the ground electrode. The CCP electrodes are attached in parallel, and plasma formed in this manner is capacitively coupled plasma. Capacitively coupled plasma sometimes produces light while generating plasma with a capacitor. Electrons bombarding an electrode quickly become negatively charged, and they create secondary plasma current in addition to the alternating current. A direct current electrode excites electrons and charges ions. This microprocess deposits a thin plasma film on an electrode. Semiconductors from CCP may be etched.
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